Influence of vacuum baking O-rings on optical properties of laser system
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摘要: 光学真空系统内的非金属材料出气会产生分子态污染，导致光学元件的透过率降低，进而会加剧激光诱导损伤，降低高功率激光装置的负载能力。提出对通光环境内的密封材料进行优选，开展热真空烘烤实验研究。结果表明，氟橡胶246出气量较小，温度对材料除气效果影响较大，且密封圈经过真空烘烤除气对光学特性影响较低，与密封圈不进行真空烘烤处理相比，紫外段平均透过率变化减少1个数量级，平均损伤密度降低了56%。该技术可应用于高功率激光装置精密洁净领域和其他精密光学洁净系统。Abstract: The outgassing of non-metallic materials in optical vacuum system will produce molecular contamination, which will lead to the decrease of transmittance of optical elements, and then aggravate laser-induced damage and reduce the load capacity of high-power laser facilities. In this paper, it is proposed to optimize the sealing materials in the laser environment, and carry out the experimental study of thermal vacuum baking. The results show that fluoroelastomer 246 has low outgassing, and temperature has great influence on the degassing effect of the material, and the vacuum baking degassing of the sealing ring has little influence on the optical characteristics. Compared with the sealing ring without vacuum baking, the average UV transmittance change decreased by 1 order of magnitude, and the average damage density decreased by 56%. This technology can be used in high-power laser facilities for precision cleaning and other optical cleaning systems.
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图 2 不同氟橡胶相对质量随时间变化关系
Figure 2. Relationship between relative mass of different FKM and time
图 4 有无真空烘烤的透过率变化对比
Figure 4. Comparison of transmittance changes with and without vacuum baking
表 1 激光装置常见密封圈材料质损率
Table 1. Mass loss rate of common sealing ring materials for laser facility
material mass loss rate/% FKM-246 0.16 FKM-26 0.32 NBR 2.5 VMQ1# 2.6 VMQ2# 16.9 
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表 2 密封圈材料规格
Table 2. Material specification of O-rings
number size (ID×CS) amount A 110 mm×4 mm 2 B 42 mm×5 mm 1 C 28 mm×5 mm 3 D 18 mm×5 mm 2
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