Abstract: Based on the relative motion of the workpiece and polishing dish, using the material removal model of fused silica optics, the influence of speed ratio and eccentricity on material removal function was analyzed, and the influence of polishing process parameters on the low frequency surface accuracy was studied by theoretical analysis and polishing experiments. Low frequency surface errors were detected using high-resolution detection equipment, preferred polishing process parameters were obtained, and the corresponding experiment was done for verification, an appropriate method was proposed to improve the low-frequency surface accuracy of fused silica optics in the polishing process.