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基于LabVIEW的超快激光制造系统设计

吴兆奎 马云灿 何煦 李军 李晓亚

吴兆奎, 马云灿, 何煦, 等. 基于LabVIEW的超快激光制造系统设计[J]. 强激光与粒子束, 2018, 30: 031002. doi: 10.11884/HPLPB201830.170312
引用本文: 吴兆奎, 马云灿, 何煦, 等. 基于LabVIEW的超快激光制造系统设计[J]. 强激光与粒子束, 2018, 30: 031002. doi: 10.11884/HPLPB201830.170312
Wu Zhaokui, Ma Yuncan, He Xu, et al. Design of ultrafast laser manufacturing system based on LabVIEW[J]. High Power Laser and Particle Beams, 2018, 30: 031002. doi: 10.11884/HPLPB201830.170312
Citation: Wu Zhaokui, Ma Yuncan, He Xu, et al. Design of ultrafast laser manufacturing system based on LabVIEW[J]. High Power Laser and Particle Beams, 2018, 30: 031002. doi: 10.11884/HPLPB201830.170312

基于LabVIEW的超快激光制造系统设计

doi: 10.11884/HPLPB201830.170312
基金项目: 

流体物理研究所冲击波物理与爆轰物理重点实验室专项科研计划项目 044030

流体物理研究所冲击波物理与爆轰物理重点实验室专项科研计划项目 044050

流体物理研究所领域规划项目 052280

详细信息
    作者简介:

    吴兆奎(1989-),男,从事飞秒激光制造技术方面的技术研究;wuzhaokui@caep.cn

    通讯作者:

    马云灿(1987-),男,博士,助理研究员,从事飞秒激光制造技术、超短超强激光X射线源的产生及应用的研究;mayuncan@caep.cn

  • 中图分类号: TP273.5

Design of ultrafast laser manufacturing system based on LabVIEW

  • 摘要: 针对当前大部分超快激光制造系统中存在的三维移动平台控制软件和光学显微镜软件集成化程度低而导致的操作方式繁琐等问题,设计了一种基于LabVIEW软件开发平台的集成化超快激光制造系统控制软件,以实现对超快激光制造系统的高效调控。该系统由飞秒激光器、三维移动平台、在线监测CCD、激光功率计、快门和计算机等六部分构成。设计思路是基于LabVIEW软件平台的多线程编程技术,将飞秒激光束的通断与三维移动平台的移动实现协调控制,采用CCD相机对样品进行对焦和监控加工状态,利用激光功率计对激光功率进行在线监测,并将其集成于同一界面以实现控制。实验证明,与常见超快激光制造系统相比,该系统稳定度高、操作简单、界面简洁、可扩展性强、调节效率高。
  • 图  1  超快激光制造系统

    Figure  1.  Ultrafast laser manufacturing system

    图  2  超快激光制造系统框图

    Figure  2.  Block diagram of ultrafast laser manufacturing system

    图  3  超快激光制造系统软件界面

    Figure  3.  Software interface of ultrafast laser manufacturing system

    图  4  Si表面微纳结构SEM图

    Figure  4.  SEM images of Si surface microstructure

    图  5  表面微结构

    Figure  5.  Surface microstructures

  • [1] Halbwax M, Sarnet T, Delaporte P, et al. Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication[J]. Thin Solid Films, 2008, 516 (20): 6791-6795. doi: 10.1016/j.tsf.2007.12.117
    [2] Vorobyev A Y, Guo C. Direct creation of black silicon using femtosecond laser pulses[J]. Applied Surface Science, 2011, 257 (16): 7291-7294. doi: 10.1016/j.apsusc.2011.03.106
    [3] Chen T, Si J, Hou X, et al. Luminescence of black silicon fabricated by high-repetition rate femtosecond laser pulses[J]. Journal of Applied Physics, 2011, 110: 073106. doi: 10.1063/1.3641976
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    [7] 闫雪亮. 电子动态调控时空整形飞秒激光透明介质微通道加工[D]. 北京: 北京理工大学, 2016.

    Yan Xueliang. Microchannels fabrication in transparent dielectric using temporally spatially shaped femtosecond laser based on electrons dynamics control. Beijing: Beijing Institute of Technology, 2016
    [8] 姜瞳. 基于飞秒激光直写微光学元件的制备及性能表征[D]. 长春: 吉林大学, 2014.

    Jiang Tong. The fabrication and performance characterization of micro-optical components based on femtosecond laser direct writing. Changchun: Jilin University, 2014
    [9] 王文君. 飞秒激光金属加工中的形状及形貌控制研究[D]. 西安: 西安交通大学, 2008.

    Wang Wenjun. Study of shape and morphology control in femtosecond laser fabrication of metals. Xi'an Jiaotong University, 2008
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    Zheng Chong. 3D Internal hollow microstructures manufactuing technology by femtosecond laser. Beijing: Beijing University of Technology, 2016
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    Lin Huizhen, Gao Yingjun, Jin Chongxing. Controlling system for optical coherence tomography based on LabVIEW. Journal of Applied Optics, 2011, 32 (3): 452-455 doi: 10.3969/j.issn.1002-2082.2011.03.015
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    Zhang Laixian, Sun Huayan, Fan Guihua, et al. High efficiency laser active detection controlling and processing system design based on LabVIEW. Infrared and Laser Engineering, 2013, 42 (12): 3239-3244 doi: 10.3969/j.issn.1007-2276.2013.12.015
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出版历程
  • 收稿日期:  2017-08-10
  • 修回日期:  2017-10-19
  • 刊出日期:  2018-03-15

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