Research on non-fixed ring belt double-side polishing technology
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摘要: 提出了一种基于平移偏摆运动的非固定环带随机双面抛光的方法，通过设计平移偏摆装置使得工件运动方式脱离固定环带的限制，借助随机性运动进行迭代，解决了行星式双面抛光等固定环带抛光过程中产生的周期性轨迹问题；通过优化运动方式组合，在随机性运动叠加情况下实现了大口径超薄元件面形稳定收敛控制。与行星式双面抛光相比，不仅面形精度更好，而且没有明显的周期性加工痕迹。该方法可以应用到对表面激光损伤阈值有特殊要求的超薄件批量生产当中。Abstract: We have proposed a method of non-fixed ring belt random double-side polishing based on the technology of translational pendulum. A device based on translation and pendulum out of limits to fixed ring belt was designed. The iterations were carried out by random motion which solved the periodic trajectory problem in the process of fixed ring belt polishing. We developed a device coupling with double-side polishing based on active translation and pendulum. We have achieved stable control of the large-aperture ultra-thin component surface shape in the random motion superposition by optimizing the combination of movement mode. Compared with planetary double-side polishing, our method not only has better surface shape, but also has no obvious periodic processing trace. The method can be applied to batch production of ultra-thin parts with special requirements for laser damage threshold of surface.
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图 2 36项泽尼克多项式对透射波前进行滤波处理
Figure 2. 36-term Zernike polynomials filtering of transmission wavefront
图 3 非固定环带随机双面抛光模型
Figure 3. Model of non-fixed ring belt random double-sided polishing
图 4 非固定环带双面抛光仿真结果
Figure 4. Results of computer simulation of non-fixed ring belt double-sided polishing
图 5 非固定环带随机双面抛光设备
Figure 5. Non-fixed ring belt random double-sided polishing equipment
图 6 430 mm×430 mm×10 mm熔石英元件的面形结果
Figure 6. Surface contour plot of 430 mm×430 mm×10 mm ultra-thin fused silica component
图 7 36项泽尼克多项式对透射波前进行滤波处理
Figure 7. 36-term Zernike polynomials filtering of transmission wavefront
图 8 430 mm×430 mm×10 mm超薄件批量生产面形结果
Figure 8. Surface contour plots of batch production of 430 mm×430 mm×10 mm ultra-thin component
表 1 非固定环带随机双面抛光模拟仿真参数设置
Table 1. Parameter setting of computer simulation of non-fixed ring belt random double-side polishing
simulation size rotation rate of bottom polishing disk/(r·min-1) rotation rate of workpiece/(r·min-1) translation cycle of workpiece/(r·min-1) swinging cycle of workpiece/(r·min-1) 430 mm×430 mm (one dot per 2.5 mm，dot array 166×166) 9 6 5 (translation stroke 200 mm) 10 (swinging stroke 200 mm) 
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