Application of automatic collimation technology for pupil and optical axis in laser beam control
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摘要: 针对复杂光机系统设计中光瞳光轴位置的传递问题，构建了光瞳光轴镜耦合控制的算法模型以及实施控制的解析公式。依据耦合控制流程，阐述了解析公式中各系数的标定过程及其方法。同时通过搭建的试验光路，验证了上述模型及解析公式的合理性。结合探测器靶面上解算出的光瞳光轴光斑中心，通过光瞳光轴耦合镜各自两电机联动控制，可单步内实现光瞳光轴的快速耦合。执行3次不同控制策略下的光瞳光轴耦合，可使光瞳耦合精度达到近场光斑的0.2%，光轴耦合精度达到3 μrad。Abstract: For the transfer of the pupil and optical axis position in the design of complex optical mechanical system, the algorithm model of coupling control of the pupil mirror and the optical axis mirror and the analytical formula for implementing control are constructed. Based on the coupling control process, the calibration process and method of each coefficient in the analytical formula are elaborated. At the same time, the rationality of the above model and the analytical formula is verified through the built test optical path. Combined with the calculated pupil and optical axis spot center on the target plane of the detector, the fast coupling of pupil and optical axis can be realized in one step through the linkage control of the two motors of the pupil and optical axis coupling mirrors. The pupil can achieve an accuracy of 0.2% of the near field spot and an accuracy of 3 μrad for the optical axis by performing three different control strategies for the pupil and optical axis coupling.
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Key words:
- pupil and optical axis /
- automatic /
- collimation technique /
- coupling control /
- centroid
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表 1 光瞳X向偏离目标位置时耦合情况
Table 1. Coupling when the pupil deviates from the target position in X direction
T1 P1 E1/mm T2 P2 E2/μrad M/s (1046.6,1022.2) (1061.6,1020.2) 0.24 (511,511.8) (513.5,516.5) 5.16 0.93 (1032.3,1021.8) (1059.7,1019) 0.42 (509.6,512.1) (514.2,521.6) 10.72 1.52 (1023.3,1022.2) (1057.4,1019.3) 0.57 (512.6,511.1) (514.6,523.8) 13.15 1.9 (1009.3,1022.5) (1054.8,1020.1) 0.75 (512.4,512.1) (515.3,526.5) 16.18 2.48 (999.4,1022.1) (1052.2,1019.3) 0.97 (511.4,512.2) (515.8,529.4) 19.38 2.89 
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表 2 光瞳Y向偏离目标位置时耦合情况
Table 2. Coupling when the pupil deviates from the target position in Y direction
T1 P1 E1/mm T2 P2 E2/μrad M/s (1063.3,1012.7) (1064.5,1018.6) 0.27 (512.4,511.4) (507.8,512.4) 4.59 0.57 (1064,1002.8) (1065.6,1016.5) 0.46 (514.5,510.3) (501.8,513.6) 11.23 0.97 (1064.3,989.3) (1066.3,1015.3) 0.57 (513.7,511) (497.6,514.9) 15.98 1.51 (1064.2,972.5) (1067.2,1013.6) 0.72 (513.3,510.1) (496.8,516) 17.1 2.19 (1063.5,967.1) (1067.8,1010.8) 0.95 (513.8,513.3) (494.8,516.5) 19.34 2.4
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表 3 光轴X向偏离目标位置时耦合情况
Table 3. Coupling when the optical axis deviates from the target position in X direction
T1 P1 E1/mm T2 P2 E2/μrad M/s (1065.8,1020.9) (1064.2,1021.7) 0.03 (412.1,509.8) (509.9,511.8) 2.3 0.28 (1064.5,1021.7) (1062.8,1021.2) 0.12 (306.6,511.1) (516.6,513.2) 5.17 0.5 (1064.5,1021) (1063.2,1020.4) 0.14 (205.5,508) (519.5,510.8) 8.26 0.65 (1063.4,1021.1) (1063.4,1020.5) 0.13 (111.6,505.3) (523.7,514.1) 12.93 0.84 (1063.5,1021.4) (1063.6,1020.2 0.15 (8.6,507.8) (527.4,513.6) 16.85 1
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表 4 光轴Y向偏离目标位置时耦合情况
Table 4. Coupling when the optical axis deviates from the target position in Y direction
T1 P1 E1/(mm) T2 P2 E2/μrad M/s (1064.2,1021.9) (1064.2,1019.9) 0.17 (513.5,409.2) (511.6,514.6) 2.86 0.36 (1064.5,1021.9) (1064.4,1019.6) 0.19 (513.1,302) (509.5,506.8) 6.28 0.52 (1064.2,1022.2) (1064.1,1020.1) 0.15 (513.3,213.9) (508.4,503.6) 9.94 0.64 (1064.6,1024.3) (1063.9,1020.3) 0.14 (512.6,113.5) (509.1,498.8) 14.7 0.71 (1064.3,1024.5) (1064.1,1020.6) 0.11 (508.4,10.2) (508.7,496.7) 17.03 0.86
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