Abstract: The reliability of high power diode-pumped solid-state laser (DPL) system was analyzed. The failure rate and mean failure-free operation time of the system were demonstrated, according to the GO graph of DPL system and GO methodology calculating formula, and the conclusion was coincident with experiential value. Furthermore, the importance of failure rates of components was analyzed, and the measures to improve the reliability of the system were also discussed, which were meaningful to the usage and maintenance of the high power DPL system. In the meantime, this method can also be applied widely to analysis of the reliability and security of industrial sectors.