PLD方法制备的纳米Fe/Al薄膜的结构及应力分析
Research on structure and micro-distortion of nano Fe/Al films fabricated by pulse laser deposition
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摘要: 采用PLD方法制备了Fe/Al合金薄膜，研究了Fe/Al合金薄膜的物相、结构、应力等。研究表明薄膜的沉积速率随着衬底温度的升高而降低。原子力显微镜（AFM）图像显示，薄膜表面平整、致密且光滑，均方根粗糙度小于1 nm。等离子体发射谱（ICP）表明Fe/Al原子比为1∶1。X射线小角衍射（XRD）分析表明薄膜中的物相是Al0.5Fe0.5，Al0.5Fe0.5晶体具有简单立方结构(SC)，晶格常数为0.297 nm，平均晶粒尺寸为81.74 nm，平均微畸变为0.007 6。
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关键词:
- 脉冲激光沉积（PLD） /
- Fe/Al合金薄膜 /
- 原子力显微镜（AFM） /
- X射线衍射（XRD)
Abstract: In this paper Fe/Al alloy thin films were fabricated by pulse laser deposition(PLD), and the crystal phase, structure and micro-strain were studied. The deposition rate of films decreased with the increasing substrate temperature. The AFM pictures show that the films are compact and smooth. ICP (inductively coupled plasma) result of sample fabricated at 573 K substrate temperature shows Fe/Al atomic ratio is 1∶1. The X-ray diffraction results indicate that the crystal is Al0.5Fe0.5 with simple cube structure, the lattice constant is 0.297 nm, the average size of grains is 81.74 nm, and the average micro-distortion is 0.007 6. All above indicate that Al0.5Fe0.5 fabricated by PLD at 573 K has good crystallinity.-
Key words:
- pulse laser deposition (pld) /
- fe/al alloy thin films /
- afm /
- x-ray diffraction (xrd)
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