Abstract: The periodic and non-periodic multilayers were designed by using a random number to change each layer of multilayers and a suitable merit function. Ion beam sputtering and magnetron sputtering were used to fabricate various multilayers including periodic, non-periodic multilayers and beam splitters in soft X-ray range. The characterization of multilayers by small angle x-ray diffraction, Auger electron spectroscopy, Rutherford back scattering spectroscopy and reflectivity illustrated the multilayers had good structures and smooth interlayers. The reflectivity and transmission of a beam splitter is about 5%. Filters is one of key components in X-ray laser experiments. The fabrication and transmission properties of Ag、Zr were studied. The Rutherford back scattering spectroscopy and Auger el