DF化学激光窗口低损耗增透膜
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摘要: 表述了DF激光波段采CaF2和硅窗口减反射膜系的结果。分析了设计多层AR膜的方法并给出用ZnSe/YbF3材料组合的双层和五层AR膜系。计算了各种膜系的理论性能。研究了膜层淀积工艺技术，对于CaF2和硅窗口，在DF激光波段实验透过率分别为99.54%和99.8%，镀AR膜CaF2窗口能承受4.3kW/cm2的连续波DF激光辐射。Abstract: The results of antireflection thin film systems for signle crystal CaF2 and silicon windows for application at DF laser wavelengths have been present in this paper. The method designing multilayer AR cating structure has been anlyzed, and ZnS/YbF3 combination. The theoretical performances evaluated for various coating. The deposition process has CaF2 and silicon windows obtained. The damage threshold is more than 4.3kW/cm2 at continue wave DF laser wavelength region for AR coated CaF2 windows.
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Key words:
- windows /
- df chemical laser /
- coatings
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