行星夹具膜厚均匀性计算
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摘要: 建立了平板型和球面型行星夹具膜厚均匀性的计算模型。利用根据这些模型编制的计算程序计算了基板表面膜层厚度分布与蒸发源位置、蒸发源发射特性、夹具高度、行星轨半径以及行星夹具的倾角之间的关系。并得到了一组典型结果。Abstract: Calculating models for flat and spherical planetary fixture were developed. Based on these models, programs were developed to calculate and analyze the film thickness distribution on these type substrates as a function of vaporizing source’s location, emissive characteristic of the source, the vertical height of fixture and the radius of planetary orbit. Representative results were given here.
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Key words:
- film /
- uniformity /
- calculation.
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