Abstract: The surface perturbation target is one of the most important experimental targets for the resolved experiments of inertial-confinement fusion (ICF). In this paper, we report the preparation of the sine modulated perturbation figures with perturbation amplitude and wavelength of about several and tens of micron respectively with the methods of ion-beam etching and laser interference. The perturbation profiles of the figures were investigated by an alpha –step device and an optical microscopic profiler. Different technological conditions, preparation process and their relationship with the quality of the figures were studied.