取样光栅镀膜减反技术研究
Anti-reflection technology for beam sampling grating
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摘要: 根据惯性约束聚变系统技术要求，提出了镀膜减反方案，以解决现有光栅由于元件表面反射影响零级透过率的问题。使用严格耦合波理论分析了镀sol-gel减反膜的取样光栅特性，详细地分析了仿形膜和平面膜的减反情况和取样效率的变化。结果发现，镀平面膜是一种可行的技术方案，光栅表面反射几乎完全消除，表明可以通过取样光栅镀膜减反来达到提高透射率的目的；裸光栅的深度为12 nm时，平面减反膜厚为60 nm，即光学厚度为等效1/4波长：72 nm。此时的透射率为99.8%，取样效率为0.241‰。Abstract: Because of the reflection on the surface of the gratings, the transmittance of the components can not meet the requirement of the inertial confinement fusion(ICF) system. To resolve the problem, this paper introduces a kind of scheme adopting coating to reduce the reflection of the gratings' surface. The characteristics of beam sampling grating(BSG) with anti-reflection sol-gel coating are analyzed using the rigorous coupled-wave theory. The anti-reflection characteristics of the BSG with conformal anti-reflective(AR) coating and planar AR coating are discussed in detail. The results show that the planar AR coating eliminates the reflection of the gratings' surface drastically. The validity of the anti-reflection technology is distinct in the application in the high power laser propagation
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