周期介质膜压缩光栅中的导模共振效应
Guided-mode resonance analysis of compressed grating with periodic stack structure
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摘要: 使用耦合波法以及特征矩阵法计算了周期膜堆结构以及介质压缩光栅的本征值，研究了介质型压缩光栅产生导模共振现象的条件，并计算了导模共振点附近光栅的衍射效率曲线。针对导模共振效应对光栅应用的影响，提出了一种避开该效应的方法。计算结果表明：当介质折射率呈周期变化时，取光栅周期为0.667 μm，深度为0.6 μm时，可以避开导模共振效应。Abstract: The guided-mode resonance effect of the compressed grating is studied. The characteristic matrix method and the coupled-wave method are used to calculate the eigenvalues of the stack structure and the grating structure. The precondition of this effect in the dielectric compressed grating has been analyzed. The diffractive efficiency near the grating is calculated. To avoid the disadvantage of the guided-mode resonance effect, the grating periods should be 0.667 μm and the depth should be 0.6 μm.
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Key words:
- compressed grating /
- guided-mode resonance /
- dielectric thin film /
- grating period
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