可实现任意形状的高效Zernike照明器
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摘要: 基于Zernike的零级谱位相修正法能将单束激光以几乎是100％的高效 率转换成规则或不规则的振幅阵列，我们给出了位相和照明孔径空间压缩比之间的关系， 并用一对位相板在实验上实现效率达89%, 3/4空间压缩比的3×3方形照明阵列。Abstract: Based on the Zernike method of the zeroorder spectral phase modification a single expanded laser beam can be converted into arbitrary illuminated shape with theoretical 100% efficiency with a pair of spec ific binary phase gratings. We have obtained the relation among the phases and t he phasemodulated space factor of the aperture.Experimental demonstration of 3/4 space factor, 3×3π phasemod ulatedsquare areas with 89% efficiency is given．
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Key words:
- diffraction grating /
- phase cont rast method
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