拼接光栅对压缩系统中的误差补偿
Compensation methods for alignment errors of tiled grating-pair compressor
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摘要: 根据失调拼接光栅对压缩系统模型，推导了拼接误差引起的角色散公式。针对光栅拼接中的转角误差和光栅常数误差，得到了误差间的相互补偿关系式，并对补偿方式进行了讨论。研究结果表明：绕光栅平面内垂直于刻线方向的转角在一定范围内可以补偿绕光栅厚度方向旋转造成的误差；绕光栅刻线方向的转角可以补偿光栅常数不同造成的误差；绕光栅平面内垂直于刻线方向或绕光栅厚度方向的转角在一定范围内也可以补偿由光栅常数不同造成的误差。前两种补偿方式的补偿效果较好。Abstract: Base on the model of gratingpair compressor, the formula of angular dispersion caused by alignment errors was derived. The compensative relations between the tilt angular errors and groovewidth difference were obtained and the compensative methods were discussed. The results show that the relative rotation about the position normal to groove can compensate the error caused by the relative rotation about the position normal to the plan of gratings, the relative rotation about the position parallel to groove can compensate the error caused by groovewidth difference and the relative rotation about the position normal to groove or about the position normal to the plan of gratings can compensate the error caused by groove-width difference. The compensation effects of the first two metho
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Key words:
- tiled gratings /
- error compensation /
- compression system /
- tilt angular errors /
- groovewidth difference
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