电子回旋共振离子源等离子体的密度测量
Plasma density measurement of electron cyclotron resonance ion source for neutron generator
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摘要: 诊断电子回旋共振离子源等离子体的传统方法是采用传统的单探针无发射时测量伏安曲线，并根据曲线的拐点由理论公式计算出的等离子体密度。本文设计并研制了等离子体密度的测量装置。采用单根朗缪尔探针（该探针可以用来发射电子）测量等离子体的伏安特性。在探针有发射和无发射两种状态下测量得到两条伏安曲线，根据这两条曲线的"分叉点"得到等离子体电位，然后根据该电位直接由计算机计算出电子温度、电子密度。采用该新方法，测量得到的等离子体参量空间电位约为17 V，悬浮电位约为-5 V，电子温度约为4.4 eV，离子密度为1.10×1011cm-3，与传统方法计算出的等离子体1.12×1011cm-3相比，两者相差仅1.8％，但新方法效率和精度更高。Abstract: It is a traditional method to diagnose electron-cyclotron-resonance (ECR) plasma source, using a single probe to measure the current-voltage curve of the plasma, based on which and theoretic formula the plasma density can be computed. The article adopts a Langmuir probe having a role of emission electrons to measure two different current-voltage curves with and without emission. It is ease to get the plasma potential via the inflexion of the two curves and compute directly various physical quantities by the assistant computor, such as electron temperature, electron/ion density, plasma potential etc. The deviation is about percent 1.8 between the measurement results by traditional and the new method, but the latter has higher efficiency.
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