155 mm入射距离的XUV平场光谱仪参量设计
Parameters of XUV spectrometer with 155 mm incident distance
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摘要: 为了缩短掠入射XUV平场谱仪尺寸以方便其使用，利用建立的光路追踪程序优化研究了当入射距离缩短为155 mm，聚焦面仍满足平面的条件下凹面光栅的各参量对谱线成像的影响。计算表明,对于曲率半径为5 649 mm、光栅标称间距为1/1 200 mm的凹面光栅，当入射距离为155 mm，入射角为87.5°，聚焦参量为-21/R，彗差参量为4.655102/R2时，可以在12 ~ 40 nm波段内得到优化的成像效果。Abstract: In order to make the grazing incidence XUV flat-field spectrograph’s size shorter for the convenience of use, a ray-tracing code is set to research the influence of the concave grating’s parameter on the spectrum imaging when the incident distance is 155 mm and the focusing surface is still flat. It is found that for the concave grating with curvature radius of 5 649 mm and 1/1 200 nm nominal spacing of the grooves, the angle of incidence is 87.5°, when the incident distance is 155 mm, the focus parameter is -21/R and the coma-type aberration parameter is 4.655102/R2, a better imaging effect within the wave band of 12 ~ 40 nm is realized.
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Key words:
- x-ray /
- x-ray flat-field spectrum apparatus /
- coma-type aberration /
- incident distance /
- focusing
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