基于数据采集系统的等离子体Langmuir探针诊断实验
Experimental study on Langmuir probe diagnosis of plasma based on data acquisition system
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摘要: 采用Langmuir探针、扫描电源和微机数据采集系统相结合，实时获得了等离子体的伏安特性曲线及参数计算结果。本数据采集系统是一个虚拟仪器系统，包括数据采集、分析测试和结果显示三部分，用来采集Langmuir探针的电流电压信号，并加以分析处理。整个测试过程非常快，可以在ms级的时间内完成，相对于手动测试，基于数据采集系统的Langmuir探针诊断实验得到的数据更为精确，电压测试范围更大，并能去除因为等离子体电位漂移而产生的曲线失真。根据所得的伏安曲线，讨论了等离子体的电子温度，离子密度等参数的计算方法。进一步研究发现电子温度随真空室气压增大而变小,离子密度随气压增大而变大。
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关键词:
- Langmuir探针 /
- 等离子体 /
- 电子温度 /
- 离子密度 /
- 数据采集系统
Abstract: Many parameters of plasma, such as electron temperature and ion density can be calculated according to the voltage-curren characteristics curve measured by Langmuir probe. A plasma scanning power system and a data acquisition system are applied in this experiment which could acquire, save, analyze and display data in real time. The data acquisition system is a virtual instrument system, composed of three sections as data acquisition, analysis and results display. It is used to acquire the Langmuir probe’s current and voltage signals, as well as analyse and process them. The entire testing process finishes in time of ms level. Compared with meanual test, Langmuir probe test based on data acquistion system could gain more accurate data in a larger voltage range(-100~100 V). Moreover, it can-
Key words:
- langmuir probe /
- plasma /
- electron temperature /
- ion density /
- data acquisition system
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