新型大气压微波等离子体炬的仿真研究
Simulation study on atmospheric pressure microwave plasma torch
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摘要: 设计了一种新型的大气压微波等离子体炬结构。入射主频为2 450 MHz，基于HFSS软件对其进行了仿真研究。在仿真过程中，对该结构的各个参数进行了优化，并得出对场强分布的影响规律。结果表明，探针的使用对腔内场分布有很大影响。根据优化参数对微波等离子体炬进行了仿真模拟，在等离子体发生腔产生了高幅值的电场强度，品质因数达到2×104，可以在大气压下激发等离子体。Abstract: An atmospheric pressure microwave plasma torch(MPT) operating at 2.45 GHz was designed. Corresponding simulation based on HFSS code was performed and the influences of structure parameters on the E-field distribution in the device were analyzed. The results indicate that the use of coupling probe will have a distinct impact on the field distribution in the device. A MPT with strong electric field amplitude and high Q-factor about 20 000 was achieved in simulation by adjusting the structure parameters, which could produce microwave plasma at atmospheric pressure.
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Key words:
- microwave plasma torch /
- atmospheric pressure /
- hfss code /
- probe /
- electric field strength
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