激光直写制作高阶螺旋相位板及其性能
Performance of high-order spiral phase plate made by direct laser writing lithography
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摘要: 将拓扑荷为4的螺旋相位光束与平面光干涉的计算全息图输入到空间光调制器中，得到含有多个衍射级次的高阶涡旋光束。为提高衍射效率，利用激光直写技术制作拓扑荷为4的高阶螺旋相位板，经测定，相位板深度理论数值为1.073 m，测量数值为1.082 m，相位板制作误差在0.83%以内。平行光束通过此相位板时，在夫琅和费衍射场获得一个高质量的高阶光学涡旋，光强分布与理论数值基本吻合，衍射效率达到86%。Abstract: A computer-generated hologram about spiral phase light beam with four topological charges is realized, which is then inputted into spatial light modulators(SLMs). When a plane wave transits through the SLMs, a series of high-order optical vortices occur. In order to improve the diffraction efficiency, a spiral phase plate(SPP) with four topological charges is created by direct laser writing lithography. The theoretical depth of SPP is 1.073 m and the measured depth is 1.082 m, showing a manufacture error of no more than 0.83%.The efficiency and beam profile of Fraunhofer diffraction of the SPP are measured with a power meter and a CCD camera. The diffraction efficiency reaches 86% and the energy distribution is in a good agreement with theory.
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