电激励O2（a1Δg）发生器的实验研究
Experimental study of singlet delta oxygen generator by RF discharge
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摘要: 在纯氧，及氧气和氩气的混合气体情况下，对射频放电产生O2（a1Δg）进行了实验研究。射频频率为13.56MHz，额定功率500W，放电压力133.0~399.0Pa， 氧气流量最大为1.4mmol/s， 氩气流量为2.1mmol/s。研究了O2（a1Δg）产率随气体流量、放电气压以及混合气体放电条件的变化。O2（a1Δg）产率最大值约为17.5%。Abstract: Experimental of singlet delta oxygen generation by RF discharge under conditions of using pure oxygen and its mixtures with argon were studied. It was discussed in detail the dependence of singlet delta oxygen yield on oxygen flow rate, the ratio of oxygen over argon and gas pressure. The experimental results show that singlet delta oxygen yield decreases with gas pressure increases. The experimental conditions were: the radio frequency was 13.56MHz, the RF power was up to 500W, the oxygen partial pressure was 133.0~399.0Pa, the flow rate of oxygen and argon was 0～1.4mmol/s and 0～2.1mmol/s, respectively. Singlet delta oxygen yield up to 17.5% was achieved．
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Key words:
- rf discharge /
- oxygen-iodine laser /
- singlet delta oxygen
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