色分离光栅镀膜减反技术研究
Study on the anti-reflection technology of color separate gratings
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摘要: 根据惯性约束聚变系统技术要求，提出一种镀膜减反方案，以解决现有光栅由于元件表面反射影响衍射效率的问题。对色分离光栅镀膜减反技术进行了详细的分析，根据标量理论给出了镀膜光栅的各项技术要求，优化了光栅结构参数。模拟计算结果发现，光栅表面反射几乎完全消除，表明可以通过色分离光栅镀膜减反提高衍射效率的目的。该镀膜光栅刻槽深度的优化值为2.84μm，膜厚为等效1/4波长，即71.2nm。Abstract: Because of the reflection on the surface of the gratings, the diffractive efficiency of the components can't meet the requirement of the ICF system. To resolve the problem this paper introduces a kind of scheme adopted coating to reduce the reflection of the gratings' surface. The coating anti-reflection technology of the CSG is discussed in detail. Using the scalar theory the design parameters have been decided and the structure parameters of the gratings have been optimized. The optimized value of the trough depth of the CSG is 2.84μm, and the optimized value of the film depth is 71.2nm. The numerical results show that the reflection of the gratings' surface has been eliminated drastically. The validity of the anti-reflection technology is distinctly in the application of the high pow
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