Abstract: A repetitive frequency and nanosecond-pulsed generator based on the semiconductor opening switch (SOS) technology is developed, in which the pulse compression unit is realized by several radio frequency (RF) MOSFETs and a saturable linear transformer driver (LTD). The RF MOSFETs are employed to obtain the forward pumping current pulses with the duration of decades of nanoseconds; the saturable LTD is to raise the pulse voltage, compress the pulse width and pump SOS reversely. The SOS assembly cuts off the reverse current in a few nanoseconds that leads to narrow output pulse formation on an external load. The experimental results show that the output pulses of the SOS generator are amplitude 11 kV and width 2 ns on a 50 resistive load. Due to the repetitive ability of RF MOSFETs, the generator can operate at repetitive frequency of larger than 20 kHz.