Algorithm for correcting quantization error in phase measuring profilometry
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摘要: 为了减小相位测量轮廓术中因数字化设备内部结构的量化处理过程引起的相位量化误差，提高相位测量精度。针对相位测量精度要求较高且表面凹凸变化不大的被扫描物体提出了一种能够有效校正相位测量轮廓术量化误差的算法，测量相位中的每一个像素点利用其相邻像素点进行校正。实验结果显示，校正之后，相位量化误差标准差减小了41.38%，相位测量的精度得到了提高。Abstract: In order to decrease the quantization effect caused by quantization process of digital devices, we propose a method to reduce the quantization error for phase measuring profilometry (PMP). The proposed method is suitable for the measurement of high precision and the surface has little change in bump. Each pixel of the calculated phase can be corrected according to neighborhood pixels. The experiment result shows that the standard deviation of phase quantization error decreases 41.38% after correction. The accuracy of phase measurement is improved.
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