自组装静电驱动微机电系统倾斜镜

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

自组装静电驱动微机电系统倾斜镜

王强, 汪为民, 邱传凯, 于军胜

文章导航 > 强激光与粒子束 > 2015 > 27(02): 024127

上一篇

下一篇

王强, 汪为民, 邱传凯, 等. 自组装静电驱动微机电系统倾斜镜[J]. 强激光与粒子束, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

引用本文:

王强, 汪为民, 邱传凯, 等. 自组装静电驱动微机电系统倾斜镜[J]. 强激光与粒子束, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

Citation:

Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

王强, 汪为民, 邱传凯, 等. 自组装静电驱动微机电系统倾斜镜[J]. 强激光与粒子束, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

引用本文:

王强, 汪为民, 邱传凯, 等. 自组装静电驱动微机电系统倾斜镜[J]. 强激光与粒子束, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

Citation:

Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127

自组装静电驱动微机电系统倾斜镜

doi: 10.11884/HPLPB201527.024127

王强^1,2,
汪为民^1,2,
邱传凯^1, ,,
于军胜²

1.
中国科学院光电技术研究所, 微细加工光学技术国家重点实验室, 成都 61 0209;
2.
电子科技大学光电信息学院, 成都 61 0054

通讯作者:
邱传凯

计量
- 文章访问数: 1235
- HTML全文浏览量: 194
- PDF下载量: 162
- 被引次数: 0
出版历程
- 收稿日期: 2014-10-28
- 修回日期: 2014-11-17
- 刊出日期: 2015-01-27

An electrostatically actuated MEMS tilting mirror based on self-assembly

1.
State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;
2.
School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China

摘要: 研制了一种基于自组装技术的静电驱动微机电系统(MEMS)倾斜镜,并利用表面硅工艺PolyMUMPs制备了样品。倾斜镜主要由一个中心镜面,两个偏转梁和两个可实现自组装的复合悬臂梁组成。中心镜面离衬底的高度可通过增大金和多晶硅复合悬臂梁的残余应力梯度得到提升。热退火技术被用于提高金层的残余应力。器件结构利用有限元仿真软件进行了优化并通过实验进行了验证。经过200 ℃热退火后,倾斜镜的偏转角度可以达到3.6。该倾斜镜可运用于微光机电系统。
- 倾斜镜 /
- 微机电系统 /
- 静电驱动 /
- 自组装
Abstract: An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6 with 200 C thermal anneal. The tilting mirror has potential to be implemented formirco-opto-electro-mechanical systems (MOEMS).
- tilting mirror /
- MEMS /
- electrostatic actuation /
- self-assembly

参考文献(0)

资源附件(0)

WeChat

点击查看大图

计量

文章访问数: 1235
HTML全文浏览量: 194
PDF下载量: 162
被引次数: 0

/

下载: 全尺寸图片幻灯片

分享

用微信扫码二维码

分享至好友和朋友圈

返回

版权所有 © 2014 中国工程物理研究院科技信息中心蜀ICP备06003668号

通信地址: 四川省绵阳919信箱805分信箱 (621900)刊社地址: 四川省绵阳市游仙区科学城科技信息中心电话: 0816-2485753传真：0816-2483701Email：HPLPB@caep.cn

本系统由北京仁和汇智信息技术有限公司开发技术支持: info@rhhz.net