Design of angular multiplexing decoding optical path for high power excimer laser system
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摘要: 根据角多路技术原理,提出了一种矩形阵列空间层叠形式的解码光路结构和先分组解码再组内解码的两步解码方式,并针对本实验室的高功率准分子激光系统给出了具体的解码光路设计实例。该方法具有解码精度高,设计误差小,与光路准直、激光参数测量系统等兼容性好,便于加工制作和安装调试等优点。Abstract: According to angular multiplexing technique, a multiplexing decoding method is presented. In this method, multiplexing decoding is achieved by two steps: in the first step the beams between the layers are decoded, and in the second step the beams in each layer are decoded. The optical elements are arranged in rectangular arrays and piled layer by layer. A specific optical design was made for the 18 beams XeCl high power excimer laser system in our laboratory. For this multiplexing decoding method, decoding accuracy is adjustable, compatibility with alignment and measurement is good, and optical structures are easy to fabricate and assemble.
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Key words:
- laser optics /
- excimer laser /
- angular multiplexing technique /
- decoding
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