Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO2 coating
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摘要: 采用大气常压等离子射流技术对溶胶-凝胶SiO2膜表面的油脂污染物进行清洗。利用分光光度计、扫描电子显微镜、红外光谱仪对溶胶-凝胶SiO2膜透过率、表面形貌、化学结构进行表征，并分析清洗前后溶胶-凝胶SiO2膜的激光损伤阈值变化。损伤阈值测试表明，1064 nm波长的激光损伤阈值由污染后的16.08 J/cm2上升到24.41 J/cm2，与污染前24.72 J/cm2的损伤阈值相当。同时还获取清洗的最佳时间为10 s。清洗前后，溶胶-凝胶SiO2膜保持完好，且未产生新的有机污染物。研究结果表明：大气常压等离子射流技术可对溶胶-凝胶SiO2膜表面的油脂污染物进行有效地清洗，从而提高溶胶-凝胶SiO2膜的透过率和激光损伤阈值，为高功率激光装置的稳定运行提供保障。
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关键词:
- 大气常压等离子射流 /
- 溶胶-凝胶SiO2膜 /
- 高功率激光真空系统 /
- 油脂污染物 /
- 激光损伤阈值
Abstract: Atmosphere pressure plasma cleaning was utilized to clean grease contamination on the surface of sol-gel SiO2 coating on K9 glass. The optical property and laser-induced damage threshold of sol-gel coating were investigated by spectrophotometer, scanning electrical microscope and infrared spectrometer, respectively. After cleaning, the laser-induced damage threshold increased from 16.08 J/cm2 to 24.41 J/cm2 with irradiated by 1064 nm, approximate to the laser-induced damage threshold before pollution. The experimental results showed that the grease contamination on the sol-gel SiO2 coating could be well cleaned by atmosphere pressure plasma jet without the coating damaged and contamination residual by properly controlling the technological parameters. -
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