基于光场调制的纳秒激光图案化石墨烯研究

李阳龙; 吴凌远; 沈欢欢; 刘国栋; 王伟平

doi:10.11884/HPLPB201830.180154

基于光场调制的纳秒激光图案化石墨烯研究

doi: 10.11884/HPLPB201830.180154

李阳龙^{1, 2,},
吴凌远^{1, 2, ,},
沈欢欢^{1, 2},
刘国栋^{1, 2},
王伟平^{1, 2}

1.
中国工程物理研究院流体物理研究所, 四川绵阳 621900
2.
中国工程物理研究院高能激光科学与技术重点实验室, 四川绵阳 621900

基金项目:

中国工程物理研究院高能激光科学与技术实验室项目 2018HEL-16

详细信息

作者简介:
李阳龙(1984—), 男, 博士生, 主要从事激光与物质相互作用研究, jesseliy@163.com

通讯作者:
吴凌远(1986—), 男, 助理研究员, 主要从事激光与物质相互作用研究, wubaly@163.com

中图分类号: O469
计量
- 文章访问数: 812
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- 被引次数: 0
出版历程
- 收稿日期: 2018-06-01
- 修回日期: 2018-11-12
- 刊出日期: 2018-12-15

Patterning of graphene by light field modulated nanosecond laser

Li Yanglong^{1, 2
,},
Wu Lingyuan^{1, 2
, ,},
Shen Huanhuan^{1, 2},
Liu Guodong^{1, 2},
Wang Weiping^{1, 2}

1.
Institute of Fluid Physics, CAEP, Mianyang 621900, China
2.
Key Laboratory of Science and Technology in High Energy Laser, China Academy of Engineering Physics, Mianyang 621900, China

摘要

摘要: 激光加工技术在石墨烯制备领域得到了许多应用。目前激光图案化石墨烯的方法多为激光逐点扫描, 而单次辐照实现图案化加工的方法鲜有报道。通过间光调制器改变激光的光场, 使光束聚焦成图案, 单次辐照直接在石墨烯样品上烧蚀实现图案化。控制激光能量为合适的值时可将石墨烯清晰地图案化而不损伤硅基底。通过拉曼光谱扫描成像发现石墨烯加工边缘清晰, 精度达到μm量级, 具有加工速度快、无需移动样品等特点。
- 石墨烯 /
- 激光 /
- 拉曼光谱 /
- 激光加工 /
- 图案化
Abstract: Laser-based approaches for graphene synthesis, reduction, modification, cutting and micro-patterning have been developed and applied to the fabrication of various electronic devices.General method utilized in direct laser writing and patterning of graphene was realized by controlling the movement of the sample or the laser reflecting mirror, while patterning by single shot laser is rarely reported.In the present study, a single shot laser patterning graphene method via light field modulating is proposed.Via controlling the light field by special light modulator (SLM), nanosecond laser pulses focused by objective lens were modulated to the desired pattern.The 4layer graphene in the laser irradiate region was damaged when laser energy was lager than 0.03 mJ.When the laser energy reached 0.06 mJ, clear pattern formed in graphene while no damage occurred in silicon base.The characteristics of graphene patterns were measured using Raman spectra imaging technology.The experimental results revealed that the light field modulated nanosecond laser remains potentially advantageous in graphene micro pattern processing with no need of moving the sample, quick processing and micrometer precision.
- graphene /
- laser /
- Raman spectra /
- laser processing /
- patterning

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图 1 实验系统光路示意图

Figure 1. Schematic diagram of experiment system

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图 2 目标图案及其全息图

Figure 2. Input patterns and their holograph

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图 3 单脉冲纳秒激光加工的石墨烯图案

Figure 3. Graphene patterns processed by single shot nanosecond laser

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图 4 (a) 石墨烯完好区域及激光损伤区域的拉曼光谱; (b), (c)激光加工石墨烯图案的拉曼光谱成像图

Figure 4. (a) Raman spectrum of graphene in unirradiated and irradiated region; (b) and(c) Raman spatial mapping of laser processed pattern

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