Self-triggering all-solid-state Marx generator
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摘要: 随着全固态高压脉冲发生器在材料改性、生物医学和工业等领域上的广泛应用，全固态脉冲发生器正朝着小型化、智能化和模块化方向发展。为了进一步减小电源的体积、降低成本，提出了一种自触发驱动的正极性全固态Marx发生器的拓扑。只需提供一路隔离信号控制一级放电开关管的导通和关断，通过级间电容对相邻级的放电管门极自动充电和放电，使其依次导通和关断。这种拓扑使得Marx发生器中的多个开关管的驱动电路简单很多，无需提供隔离供电的多路驱动电源，且避免了开关的动态、静态均压问题。基于这种拓扑搭建了一台17级的正极性Marx发生器样机，且电压幅值和脉宽都连续可调，在10 kΩ纯阻性负载上输出10 kV、重复频率100 Hz的正极性高压脉冲，脉冲前沿约为328 ns。样机体积小巧、工作稳定，验证了该方案的可行性。Abstract: With the wide application of all-solid-state high-voltage pulse generators in the fields of material modification, biomedicine and industry, all-solid-state pulse generators are developing in the direction of miniaturization, intelligence and modularization. To further reduce the volume and cost of the power supply, this paper proposes a positive self-triggering all-solid-state Marx generator topology. It only needs to provide an isolated signal to control the turn-on and turn-off of discharging switch in the first stage, and the gates of the adjacent-stage discharging switches will be automatically charged and discharged through the inter-stage capacitors, so that they turn on and off one by one. This topology makes the driving circuit of the multiple switches in the Marx generators much simpler and does not need to provide a multi-channel driving power supply with isolated power supplies, and also avoids the dynamic and static voltage balancing problems of the switches. Based on this topology, a 17-stage positive polarity Marx generator prototype is built, and the voltage amplitudes and pulse widths are continuously adjustable. It outputs 10 kV positive high-voltage pulses at a repetition frequency of 100 Hz over a 10 kΩ resistive load. The leading edge is approximately 328 ns. The prototype is small in size and stable in work, which verifies the feasibility of this topology.
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Key words:
- self-triggering /
- Marx generator /
- pulse generator /
- pulsed power
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图 2 阻容串联负载下的充电回路和阻性负载下的充电回路
Figure 2. The charging circuit with resistor-capacitor series load and resistive load
图 3 自触发第一级驱动回路和自触发第二级驱动回路
Figure 3. The turn-on process of self-triggering drive circuit for the first stage and the second stage
图 4 自触发第一级关断回路和自触发第二级关断回路
Figure 4. The turn-off process of self-triggering circuit for the first stage and the second stage
图 5 5级正极性自触发驱动Marx发生器仿真电路
Figure 5. Simulation circuit of 5-stage positive self-triggering Marx generator
图 8 17级自触发驱动的Marx发生器实物图
Figure 8. The photo of the 17-stage self-triggering Marx generator
图 9 第5级开关的自触发的驱动电压
Figure 9. The self-triggering driving voltage over the switch in the 5th stage
图 10 17级自触发驱动的Marx发生器的输出的单个脉冲电压波形和100 Hz重频电压波形
Figure 10. The output voltage waveform of a single pulse and 100 Hz repetitive pulses generated by the 17-stage self-trigger Marx generator
图 11 17级自触发驱动的Marx发生器在10 kΩ纯阻性负载上的电压波形
Figure 11. Voltage waveforms over 10 kΩ resistor load
图 12 正极性自触发驱动的Marx发生器在阻容串联负载下的输出电压波形
Figure 12. The waveform of the voltage over capacitive load driven by the positive self-triggering Marx generator
表 1 电路参数
Table 1. Circuit parameters
input DC voltage/V signal width/μs storage capacitance of Cn/μF gate capacitance of Cg(n−1)/nF driving capacitance of Cd(n−1)/pF gate series resistance/Ω gate parallel resistance/kΩ resistance of load/kΩ 600 1 1.47 4.7 150 12 5.1 10 
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