静力水准系统用于基准高差测量的研究

李笑; 何晓业; 王巍; 程竹兵; 高廷; 罗涛

doi:10.11884/HPLPB202234.220195

静力水准系统用于基准高差测量的研究

doi: 10.11884/HPLPB202234.220195

李笑^1,,
何晓业^1, ,,
王巍^1, ,,
程竹兵¹,
高廷^{1, 2},
罗涛¹

1.
中国科学技术大学国家同步辐射实验室，合肥 230026
2.
中国航空工业集团公司北京长城计量测试技术研究所，北京 100095

基金项目: 合肥大科学中心协同创新培育基金20年（2020HSC-CIP007）

详细信息

作者简介:
李　笑，lx520@mail.ustc.edu.cn

通讯作者:
何晓业，xyhe@ustc.edu.cn

王　巍，wangwei0829@ustc.edu.cn

中图分类号: TL505
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- 文章访问数: 613
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- 被引次数: 0
出版历程
- 收稿日期: 2022-06-09
- 修回日期: 2022-07-27
- 录用日期: 2022-09-02
- 网络出版日期: 2022-11-02
- 刊出日期: 2022-11-02

Research on measurement method of altitude difference using hydrostatic leveling system

Li Xiao^1
,,
He Xiaoye^{1
, ,},
Wang Wei^{1
, ,},
Cheng Zhubing¹,
Gao Ting^{1, 2},
Luo Tao¹

1.
National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, China
2.
Changcheng Institute of Metrology & Measurement of AVIC, Beijing 100095, China

摘要

摘要: 为了拓展静力水准系统（HLS）在粒子加速器准直测量工作中的应用，开展了针对HLS系统用于多点间基于水平面的基准高差测量的实现方法的研究。基于传感器工作原理，设计并搭建了一套由双频激光干涉仪、高精度位移平台、HLS传感器等组成的比对系统，利用该系统控制多传感器在同一坐标系下观测同一液位。通过比对获得多传感器间基于底部坐标系的零位高度差，实现了多个传感器坐标系间相对于水平面的高差值测量，并验证了高差测量精度优于5 μm。除此之外，通过在HLS传感器上方安装靶座，使用三坐标测量机(CMM)严格标定各传感器电极板至靶球球心的距离，实现了多靶球球心位置基于水平面的高差值测量，并验证了其测量精度优于30 μm。
- 精密测量 /
- 精密仪器 /
- 静力水准系统 /
- 加速器准直 /
- 高差测量
Abstract: As the precise sensor system for monitoring the relative difference in height among multiple points, the hydrostatic leveling system (HLS) is widely used in particle accelerators. At present, the HLS system is mainly used for the measurement of relative altitude changes. To expand the application of HLS system in accelerator alignment, the research on the issue of HLS system for altitude difference measurement based on the horizontal plane between multiple points is carried out. Firstly, the measurement principle of capacitive HLS sensor is introduced briefly. Based on the working principle of the sensor, a comparison system composed of dual-frequency laser interferometer, high-precision Z stage, HLS sensors and others is designed and manufactured. The system is used to control multiple sensors to observe the same liquid level in the same coordinate system. The zero-position difference between multiple sensors based on the sensor coordinate system are obtained by comparison, and the absolute height difference measurement with respect to a hydrostatic surface between the multi-sensor coordinate systems is realized, and it is verified that the measurement accuracy is better than 5 μm. In addition, by installing the target holder above the HLS sensor, and using the coordinate measuring machine (CMM) to strictly calibrate the distance between the sensor surface to the center of the target of each sensor, the absolute height difference measurement of the position of the multi-target centers with respect to the hydrostatic surface is realized, and its measurement accuracy is better than 30 μm.
- precise measurement /
- precision instrument /
- hydrostatic leveling system /
- accelerator alignment /
- altitude difference measurement

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图 1 电容式HLS传感器测量原理

Figure 1. Measurement principle of capacitive HLS sensor

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图 2 零位差比对平台

Figure 2. The zero-difference comparison platform

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图 3 零位差比对原理示意图

Figure 3. Schematic diagram of zero-difference comparison

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图 4 基准传感器重复精度

Figure 4. Repeatability of the reference sensor

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图 5 Nivel传感器测量原理

Figure 5. Principle of operation of a Nivel sensor

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图 6 HLS传感器坐标系建立

Figure 6. Construction of the HLS coordinate system

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图 7 传感器坐标系间绝对高差测量结果

Figure 7. Absolute altitude difference measurement results between sensor coordinate systems

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图 8 H值标定

Figure 8. Calibration of the value of H

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图 9 靶球中心基准高差测量

Figure 9. Height difference measurement results between target centers

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图 10 靶球中心基准高差测量偏差

Figure 10. Measurement errors of height difference between target centers

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表 1 HLS传感器读数

Table 1. Values of the HLS sensors reading

sensor numbers	sensor readings/μm
sensor numbers	first reading	second reading	third reading	average
33	7527.2	7527.1	7525.3	7526.5
36	7527.0	7526.0	7525.7	7526.2
32	7536.5	7536.0	7536.9	7536.5
38	7532.8	7533.0	7533.1	7533.0
44	7528.4	7528.2	7529.3	7528.6

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表 2 倾斜仪读数及d值

Table 2. Values of the tilt and d

sensor numbers	tilt/mrad	correction/μm	d/μm
33	0.000	7526.5	−26.5
36	0.000	7526.2	−26.2
32	0.001	7536.2	−36.2
38	0.004	7531.7	−31.7
44	0.001	7528.3	−28.3

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表 3 H标定值

Table 3. Calibration value of H

numbers	H/μm
32	109668.96
33	109615.64
38	109401.21
41	109414.31
44	109439.87

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表 4 CMM及HLS传感器测量值

Table 4. Measurement values of CMM and HLS sensors

sensor numbers	values/μm
sensor numbers	target center-plane H	D
32	94064.34	9005.33
33	94012.28	9012.24
38	93795.38	9013.84
41	93832.26	9011.95
44	93834.94	9019.77

下载: 导出CSV

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