20 kV高压脉冲幅度校准装置设计

龙国浩; 袁汉; 何鹏; 郭晓东; 王凌云

doi:10.11884/HPLPB202335.220298

20 kV高压脉冲幅度校准装置设计

doi: 10.11884/HPLPB202335.220298

龙国浩^1,,
袁汉¹,
何鹏¹,
郭晓东¹,
王凌云^2, ,

1.
中国工程物理研究院计量测试中心，四川绵阳 621000
2.
中国工程物理研究院流体物理研究所，四川绵阳 621900

详细信息

作者简介:
龙国浩，longghnuaa@163.com

通讯作者:
王凌云，101kpa@sina.com

中图分类号: TM832
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- 被引次数: 0
出版历程
- 收稿日期: 2022-09-23
- 修回日期: 2022-11-22
- 网络出版日期: 2022-11-24
- 刊出日期: 2023-01-14

Design of 20 kV high voltage pulse amplitude calibration device

1.
The Center of Metrology and Testing, CAEP, Mianyang 621900, China
2.
Institute of Fluid Physics, CAEP, Mianyang 621900, China

摘要

摘要: 针对高压脉冲幅度的量值传递需求，开展了脉冲幅度1～20 kV、脉宽1～100 μs的高压脉冲幅度校准装置设计。校准装置以高压MOSFET器件为核心，搭建多级Marx结构实现高压脉冲成型，同时通过截尾回路的设计缩短脉冲下降时间，实现矩形脉冲波形的输出。在Marx结构基础上开展装置整体设计，通过触发脉冲信号及高压直流电源电压调节脉宽与幅度，通过隔离电源及光信号保证了高压隔离强度。装置采用高准确度高压探头和数据采集卡构成校准装置的内部测试系统，其测量值作为校准装置的标准量值，经评定装置脉冲幅度不确定度为2%，并通过两台比对法进行了验证。采用其他多型高压探头对校准装置进行实验测试，结果表明与低压脉冲校准源测试相比，高压脉冲可明显有效地表征高压探头的性能及测量准确度，同时本装置也可作为高压脉冲发生器应用于脉冲功率领域其他用途。
- 脉冲功率 /
- 脉冲幅度 /
- 校准 /
- MOSFET /
- Marx
Abstract: In order to meet the need of magnitude transmission of high voltage pulse amplitude, this paper develops the design of high voltage pulse amplitude calibration device with pulse amplitude of 1-20 kV and pulse width of 1-100 μs. The calibration device takes the high voltage MOSFET as the core, and builds up a multi-stage Marx structure to achieve high voltage pulse. At the same time, the truncation circuit greatly reduces the pulse fall time and realizes the output of rectangular pulse waveform. On the basis of the Marx structure, the unit is built as a whole. The pulse width and amplitude can be adjusted by triggering pulse and high voltage DC power supply voltage, and the high voltage isolation is guaranteed by isolating power module and optical signal. The device uses high-precision high voltage probe and oscilloscope to constitute the internal measurement module. The measurement value is the standard value of the calibration device. The uncertainty of the pulse amplitude of the device is evaluated, and it is verified by comparison of two measurement standards. The calibration device is tested with other types of high voltage probes. The results show that, compared with the low-voltage pulse calibration source, the high voltage pulse can effectively characterize the performance and measurement accuracy of the high voltage probe, achieve the calibration of the high voltage probe, and the device can also be applied as a high voltage pulse source for other purposes in the field of pulse power field.
- pulse power /
- pulse amplitude /
- calibration /
- MOSFET /
- Marx

HTML全文

图 1 多级固态开关Marx结构原理简图

Figure 1. Schematic diagram of multistage solid state switch Marx structure

下载: 全尺寸图片幻灯片

图 2 校准装置组成简图

Figure 2. Composition sketch of calibration device

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图 3 高压脉冲幅度校准装置实物图及输出波形图

Figure 3. Photo diagram and output waveform diagram of high voltage pulse amplitude calibration device

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表 1 多型高压探头测试数据表

Table 1. Multi-type high voltage probe test data table

standard voltage/kV	supply voltage/kV	voltage of PVM-1/kV	voltage of DP20-20K-LVC/kV	voltage of P6015A/kV
1	0.176	1.007	1.008	1.023
6	1.050	6.052	6.052	6.027
12	2.100	12.080	12.110	12.040
18	3.200	18.150	19.620	17.780
20	3.600	20.220	23.040	20.340

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