Performance test and fatigue test of tensile/compressible piezoelectric ceramics
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摘要: 压电陶瓷是自适应光学系统中的核心器件变形镜的主要作动元件，其性能的好坏直接影响变形镜甚至自适应光学系统校正能力。开展了加载电压为±350 V、外形尺寸为5 mm×5 mm×38 mm的抗拉可压型压电陶瓷的性能测试，包括位移、迟滞、电容、阻抗和热膨胀系数等，对压电陶瓷的抗拉能力进行了考核，获得三个样品抗拉能力均大于250 N。采用疲劳测试仪对同批次生产的压电陶瓷进行疲劳试验，在此过程中获得了压电陶瓷的压电效应并对试验数据进行了分析，最后对5#样品进行了1 000万次疲劳试验（±150 N@5 Hz正弦载荷），试验后压电陶瓷的位移减小约5%，其他指标变化较小。通过抗拉能力测试和疲劳试验，初步考核了该型压电陶瓷的抗拉压特性和疲劳特性以及压电陶瓷的使用寿命，为变形镜的研制提供一定的数据支撑。Abstract: Piezoelectric ceramic is the main actuator of deformable mirror, which is the core device of adaptive optics system. Its performance directly affects the correction ability of deformable mirror and even adaptive optics system. Performance parameters of the tensile/compressible piezoelectric ceramics (5 mm×5 mm×38 mm) with loading voltage of ±350 V were tested, including displacement, hysteresis, capacitance, impedance and coefficient of thermal expansion, etc. The test results show the tensile capacity of three samples was more than 250 N, and 10 million fatigue tests (±150 N@5 Hz sinusoidal load) were carried out on 5# sample. The experimental results show that the displacement and capacitance of the sample reduced than 5%. Through the tensile/pressure and fatigue test, the properties and service life of the piezoelectric ceramic were examined, which provides some supporting data for the development of deformable mirrors.
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图 1 压电陶瓷测试系统和测试曲线
Figure 1. Piezoelectric ceramic displacement test system and the test curve
图 7 ±150 N@10 Hz正弦载荷曲线及压电陶瓷形变曲线
Figure 7. ±150 N@10 Hz sinusoidal load curve and deformation curve of piezoelectric ceramics
图 8 ±150 N@10 Hz正弦载荷下压电陶瓷的输出电压曲线（正压电效应曲线）
Figure 8. ±150 N@10 Hz output voltage curve of piezoelectric ceramics under sinusoidal load （positive piezoelectric effect curve）
图 9 正弦载荷曲线及压电陶瓷最大/最小形变量曲线
Figure 9. Sinusoidal load curve and maximum/minimum deformation curve of piezoelectric ceramics
图 10 压电陶瓷形变量曲线偏移及清零曲线
Figure 10. Deviation and zero clearing curve of piezoelectric ceramics
图 11 1000万次疲劳试验过程中压电陶瓷位移形变量曲线
Figure 11. Displacement and deformation curve of piezoelectric ceramics during 10 million fatigue tests
表 1 拉力试验测试数据汇总表
Table 1. Tensile test summary table
No. maximum tensile stress/MPa maximum pulling force/N 1 12.3 289 2 11.7 276 3 10.7 251 
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