Areal density measurement technology for metal foils based on X-ray bent crystal imaging
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摘要: 针对靶用高Z金属薄膜的无损检测需求，提出了一种通过超环面弯晶聚焦型X光单能成像器件，实现金属薄膜均匀性及面密度等参数精确标定的测量技术。该技术即通过高通量、高单能性成像，定量获取薄膜X光透过率及其空间分布，有效提升了面密度测量的精度，同时实现了对其均匀性的高空间分辨评估。从总体方案设计、元器件制备和测试实验等方面开展了深入研究，并评估了各种可能因素对测量不确定度的影响。所发展的超环面弯晶成像系统针对20 keV级的高能X射线在mm尺度内实现了优于5 μm的微区分辨，能谱分辨达到几eV。通过泡沫金样品面密度测量实验证明了技术可行性，相对不确定度优于2%。研究结果为激光惯性约束聚变高Z靶材料的精密无损检测提供了一种新的测量技术，并有望应用于其他需要大视场、高空谱分辨成像的需求领域。Abstract: In view of the measurement requirements of uniformity and areal density parameters of target metal foils, a non-destructive testing technology for high-Z metal foils by obtaining thin film X-ray transmittance and its spatial distribution through a toroidal crystal focusing type X-ray monochromatic imaging device is proposed. This technology not only effectively improves the accuracy of areal density measurement by high-throughput and high-monochromatic imaging, but also realizes high spatial resolution evaluation of thin film uniformity. This paper carries out in-depth research from the aspects of overall scheme design, component preparation and test experiment, and evaluates the influence of various possible factors on measurement uncertainty. The developed toroidal crystal imaging system achieves micro-region resolution better than 5 μm within millimeter scale for 20 keV-level high-energy X-rays, and spectral resolution reaches several eV. The feasibility of the developed technology is verified by surface density measurement experiment of foam gold sample, and relative uncertainty of areal density measurement better than 2% is obtained. This paper provides a new measurement technology for precise non-destructive testing of high-Z target materials for laser inertial confinement fusion, which is also expected to be applied to other fields that require large field of view and high spatial spectral resolution imaging.
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Key words:
- metal foil /
- X-ray imaging /
- toroidal crystal /
- high spectral resolution /
- surface density measurement
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图 1 超环面弯晶面密度测量方案图
Figure 1. Scheme diagram of the toroidal crystal to measure areal density
图 2 Ge
$\left\langle 511 \right\rangle $ 超环面弯晶对600目金网的成像结果Figure 2. Image of a 600-mesh gold mesh by Ge
$\left\langle 511 \right\rangle $ toroidal crystal
图 3 X-ray Tracer模拟Ge
$\left\langle 511 \right\rangle $ 超环面弯晶的成像及能谱分辨Figure 3. X-ray Tracer simulated imaging and spectroscopic resolution of Ge
$\left\langle 511 \right\rangle $ toroidal crystal
图 4 超环面弯晶测量泡沫金面密度的实验排布
Figure 4. Experimental arrangement of toroidal crystal for measuring the areal density of foam gold
图 5 超环面弯晶泡沫金面密度测量结果
Figure 5. Results of areal density measurement of foam gold in toroidal crystal
图 6 面密度测量不确定度来源及分类
Figure 6. Sources and classification of uncertainty of areal density measurement
表 1 Ge
$\left\langle 511 \right\rangle $ 超环面弯晶系统光学结构参数Table 1. Optical structure parameters of toroidal crystal system for Ge
$\left\langle 511 \right\rangle $ crystal material crystal orientation θ/(°) Rm/mm Rs/mm object distance/mm image distance/mm Ge $\left\langle 511 \right\rangle $ 77.74 300 286.5 171.01 1 026.05 
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表 2 Ge
$\left\langle 511 \right\rangle $ 测量泡沫金样品面密度Table 2. Ge
$\left\langle 511 \right\rangle $ measurement of surface density of foam gold sampleNo. image coordinates/mm direct light count (I0) transmitted light count (I) transmissivity/% areal density/(mg/cm2) thickness/μm P_1 (409,276) 3 309 600 18.132 15.856 8.207 P_2 (432,274) 3 003 590 19.647 15.108 7.820 P_3 (441,281) 2 871 554 19.296 15.290 7.914 P_4 (415,298) 3 433 609 17.740 16.055 8.310 P_5 (436,297) 3 523 624 17.712 16.072 8.319 P_6 (395,313) 3 450 647 18.754 15.547 8.047 P_7 (427,324) 3 599 613 17.033 16.432 8.505 P_8 (403,326) 3 366 594 17.647 16.107 8.337
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