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一种RF屏蔽型CF法兰-密封圈结构设计

赵峰 朱潇潇 尉伟 常仁超 张浩 林涵文

赵峰, 朱潇潇, 尉伟, 等. 一种RF屏蔽型CF法兰-密封圈结构设计[J]. 强激光与粒子束, 2025, 37: 094002. doi: 10.11884/HPLPB202537.250024
引用本文: 赵峰, 朱潇潇, 尉伟, 等. 一种RF屏蔽型CF法兰-密封圈结构设计[J]. 强激光与粒子束, 2025, 37: 094002. doi: 10.11884/HPLPB202537.250024
Zhao Feng, Zhu Xiaoxiao, Wei Wei, et al. Design of RF shielding CF flange copper ring structure[J]. High Power Laser and Particle Beams, 2025, 37: 094002. doi: 10.11884/HPLPB202537.250024
Citation: Zhao Feng, Zhu Xiaoxiao, Wei Wei, et al. Design of RF shielding CF flange copper ring structure[J]. High Power Laser and Particle Beams, 2025, 37: 094002. doi: 10.11884/HPLPB202537.250024

一种RF屏蔽型CF法兰-密封圈结构设计

doi: 10.11884/HPLPB202537.250024
基金项目: 深圳市科技计划项目(JCYJ20220530140807017)
详细信息
    作者简介:

    赵 峰,1138973524@qq.com

    通讯作者:

    尉 伟,weiwei@mail.iasf.ac.cn

  • 中图分类号: TL35; TB75

Design of RF shielding CF flange copper ring structure

  • 摘要: 高能电子加速器中,束流与真空室相互作用产生的尾场会引发束流不稳定性,此现象在高重频(>105 Hz)超导加速器中尤为明显。全金属加速器真空室大量使用的CF刀口法兰,其连接处截面突变是导致产生束流耦合阻抗的主要来源之一。设计了一种RF屏蔽型法兰-密封圈连接结构,其目的是通过实现法兰-密封圈-法兰预紧密封后的平滑过渡,有效减少阻抗。首先,采用3D电磁仿真CST软件对比仿真了连接过渡段不同径向台阶和轴向间隙参数下的阻抗效应,给出了相关参数的允许范围。然后,通过ANSYS软件对屏蔽法兰-铜圈结构进行了形变仿真,初步制定了不同型号的屏蔽密封圈的内径几何参数,在屏蔽法兰-密封圈的真空密封试验中,验证了预紧力矩≥6 N·m时即可实现有效的超高真空密封,并且通过屏蔽法兰-密封铜圈过渡段径向台阶和轴向间隙测试试验,得到了最优预紧力矩和屏蔽铜圈的关键尺寸参数。最后,采用对光滑真空管段、标准法兰-密封圈过渡段和屏蔽法兰-密封圈过渡段的功率损失和阻抗进行了仿真计算,验证了所设计的RF屏蔽型法兰-密封圈连接结构可以有效地实现阻抗屏蔽。
  • 图  1  法兰铜圈连接过渡段示意图

    Figure  1.  Schematic diagram of the transition section of the flange copper ring connection

    图  2  法兰铜圈连接过渡段射频阻抗仿真

    Figure  2.  RF impedance simulation of vacuum flange transition with copper gasket

    图  3  屏蔽法兰-密封圈关键尺寸示意图

    Figure  3.  Shielding flange-copper ring key dimension diagram

    图  4  屏蔽法兰-铜圈仿真模型

    Figure  4.  Shield flange-copper ring simulation model

    图  5  不同型号的屏蔽铜圈塑性变形仿真结果

    Figure  5.  Simulation results of plastic deformation of different types of shielded copper ring

    图  6  密封试验装置

    Figure  6.  Testing device

    图  7  屏蔽铜圈试验样件

    Figure  7.  Shielding copper ring test sample

    图  8  检漏测试

    Figure  8.  Leak detection process of the steal

    图  9  不同预紧力矩下装置漏率结果

    Figure  9.  Leakage rate of the device under different fastening torques

    图  10  高温烘烤后装置漏率检测结果

    Figure  10.  Leakage rate of the device after high temperature baking

    图  11  测量点位置

    Figure  11.  Locations of the measurement points

    图  12  千分表测量过程

    Figure  12.  Dial meter measurement process

    图  13  铜圈半径形变测试结果

    Figure  13.  Test results of copper ring distortion

    图  14  屏蔽铜圈形变测试验证

    Figure  14.  Shielded copper ring test verification

    图  15  三坐标测量仪测量过程

    Figure  15.  Coordinate measurement process

    图  16  阻抗仿真模型示意图

    Figure  16.  Impedance simulation model diagram

    图  17  功率损失仿真对比结果

    Figure  17.  Impedance simulation results

    图  18  阻抗仿真对比

    Figure  18.  Impedance simulation comparison

    表  1  不同型号屏蔽铜圈内外径加工尺寸

    Table  1.   Different types of shielded copper inner diameter and outer diameter processing size

    types internal diameter/mm external diameter/mm
    DN35 $35_{0.02}^{0.04} $ $48.3_{-0.011}^{0} $
    DN50 $50_{0.04}^{0.06} $ $61.6_{-0.013}^{0} $
    DN63 $63_{0.06}^{0.08} $ $82.5_{-0.015}^{0} $
    DN100 $100_{0.08}^{0.16} $ $120.6_{-0.018}^{0} $
    下载: 导出CSV

    表  2  屏蔽法兰-密封圈连接过渡段径向台阶高度

    Table  2.   The height of the radial steps of the copper ring flange connection transition section

    moment/(N·m) ΔD/μm
    sample 1 sample 2 sample 3 sample 4 sample 5
    10 −58 −50 −55 −56 −58
    11 −40 −43 −37 −40 −39
    12 −30 −38 −29 −30 30
    13 −15 −25 −10 −15 −10
    14 −5 −10 −0 −5 −0
    15 10 5 5 10 9
    16 20 0 10 20 15
    下载: 导出CSV

    表  3  铜圈法兰连接过渡段轴向间隙

    Table  3.   The copper ring flange connects the axial clearance of the transition section

    ΔL/mm
    position/m ΔD=0.4 mm ΔD=0.45 mm ΔD=0.5 mm
    screw side nut side screw side nut side screw side nut side
    1 0.2 0.17 0.15 0.16 0.1 0.084
    2 0.2 0.18 0.14 0.17 0.09 0.088
    3 0.2 0.19 0.13 0.16 0.062 0.088
    4 0.18 0.2 0.13 0.19 0.058 0.118
    5 0.18 0.18 0.13 0.18 0.068 0.118
    6 0.18 0.18 0.14 0.18 0.068 0.118
    7 0.2 0.18 0.16 0.18 0.096 0.11
    8 0.2 0.17 0.16 0.18 0.1 0.09
    下载: 导出CSV
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出版历程
  • 收稿日期:  2025-02-14
  • 修回日期:  2025-07-15
  • 录用日期:  2025-07-16
  • 网络出版日期:  2025-08-21
  • 刊出日期:  2025-09-05

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