Surface measurement and evaluation of large-aperture continuous phase plates
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摘要: 基于全局最小二乘拼接算法和图像融合算法建立了连续相位板（CPP）子孔径拼接检测算法，并根据全局相关匹配原理提出采用面形残差来评价CPP的加工面形。采用高精度动态干涉仪等设备建立了相应的检测系统，并针对430 mm430 mm口径CPP开展了数值模拟和检测实验。理论计算结果表明：系统计算误差为0.005 nm。实验结果表明,整个检测系统软硬件RMS误差小于5 nm，基本满足CPP面形检测要求。从而验证了CPP检测和评价的正确性和可行性。Abstract: Based on the stitching method using global least squares and the image fusion method, the sub-aperture stitching interferometry method for continuous phase plates(CPPs) is established. The residual surface error calculated by correlative matching is used to evaluate the CPPs fabrication quality. Moreover, the measurement system is built using high precision dynamic interferometer. The numerical simulation and measurement are carried into execution for a CPP with 430 mm430 mm aperture. The results show that the root mean square(RMS) of residual surface error obtained by numerical simulation is only 0.005 nm and the experimental RMS of residual surface error is less than 5 nm. So these parameters can meet the demands of surface measurement and evaluation of large-aperture continuous phase plates, and the correctness and feasibility of this method are verified.
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