Abstract: Aiming at the difficulties and high-precision detection demand for assembly error inspection of micro-capsule in inertial confinement fusion(ICF) device, the measurement system for assembly parameters detection of laser target is developed. A compound measuring method based on laser probe and CCD is proposed. The mathematical model for data fusion of the compound probe is established by calibrating their spatial location relationship. Thus, high-precision 3D inspection is realized. The inspection method of micro-capsule assembly error is discussed in two cases. The experimental results demonstrate the validity of these two approaches. Furthermore, the measurement precision of such two approaches is compared and their limit errors are both within 3 m.