Abstract: Detecting total quantity and depth profile of tritium for volume phase of metal tritiated compound is a key problem in behavior research of tritium. In this paper, depth profiling of tritium is studied by the tritium beta decay to induce X ray spectrum(??IXS),and a mechanics model for depth profiling of tritium calculating in tritium film target is established. Inversion of depth profile of tritium is performed by Tikhonov regularization method. The inversion results indicated that the regularization method can avoid ill-condition inverse problems, and the method can enhance effectively the resolution in heterogeneity of normal direction of the tritium film target.