Fabrication and properties of V-doped semi-insulating 6H-SiC photoconductive semiconductor switch

High power photoconductive semiconductor switches (PCSSs) were fabricated on V-doped semi-insulating 6H-SiC single crystal. The 6H-SiC PCSS were measured by applying a bias voltage from 1 kV to 14 kV. The triggered laser was a 355 nm pulse laser with an energy density of 150 J/mm2. The peak photocurrent shows an increasing trend with improving the applied voltage. The peak photocurrent running through the PCSS and the calculated on-state resistance are 185 A and about 22 respectively when the applied voltage reaches 14 kV, and the corresponding peak power is 2.59 MW.