New light dose monitoring algorithm based on grouping pulse

Precise control of pulse laser light dose is the key to guarantee processing product technology and quality. After analyzing the existing light dose feedback control algorithm, based on grouping pulse, a new grouping pulse dose monitoring feedback control algorithm was proposed to effectively improve the precision and the speed of light dose monitoring and feedback control. A light dose monitoring system was designed to monitor the light dose and control the feedback in real time. Compared with the StarLab laser energy measurement made by Ophir, in the case of the total energy less than 500 laser pulses, the energy measurement error of the system is less than 0.15%. Light dose monitoring experiment was carried out on a set of pulse laser machining system, the max repetition frequency of which is 10 kHz, the single pulse max energy of which is 5 mJ, the max energy fluctuations of which is 10% in constant voltage. In the monitoring of the system, in the case of the target light dose within 150 mJ/mm2, light dose control accuracy and repeated accuracy can be controlled within 1.90% and 0.100 mJ/mm2 respectively, at the same time, the control speed of the light dose feedback increased 4 times.