Magnetorheological finishing removal stability of large aperture aspherical optics

In this paper, the factors of dynamic stability of the removal function were analyzed. In order to improve the precision of magnetorheological finishing (MRF), an automatic positioning system of aspherical optics was designed. A new approach was used for evaluating dynamic characteristics of removal function. At the same time, a verification experiment was carried out on 400 mm400 mm square aspheric, the PV of the surface precision was 0.331 and the GRMS value was 0.008 /cm. The ability of aspherical optics of the magneto-rheological processing was verified.