Investigation of vapor deposited polymerized polyimide capsule on deposition uniformity and properties

To satisfy requirement of polyimide(PI) capsules for inertial confinement fusion (ICF) targets, influence of monomer heating temperature on the thin film, thickness uniformity and surface quality of shells treated by impulse tapping, configuration of PI after curing process and heating stabilization were investigated. The results show that composite shells root-mean-square value ranged from 29 nm to 45 nm by impulse tapping, which is close to ICF standard. The thickness of films is less than 1 m in both vertical and lateral directions, which is uniform. After the curing process, PAA is converted to PI. CONH is combined with COOH to form C-N. The thermal stability of films is well, which greatly deforms at 600 ℃ and still reserves 20% at 900 ℃.