Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127
Citation:
Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127
Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127
Citation:
Wang Qiang, Wang Weimin, Qiu Chuankai, et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. High Power Laser and Particle Beams, 2015, 27: 024127. doi: 10.11884/HPLPB201527.024127
State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;
2.
School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China
An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6 with 200 C thermal anneal. The tilting mirror has potential to be implemented formirco-opto-electro-mechanical systems (MOEMS).
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