A calibration and compensation method for piezoresistive atmosphere pressure sensor

In this paper, we present a simplified calibration and compensation method that enables the piezoresistive pressure sensor to function with high resolution in wide range of ambient temperature. Normally, extensive work in calibration and compensation of atmosphere piezoresistive pressure sensors is always requested. In order to simplify the calibration and compensation method, the sensors structure is studied through incorporating heating resistors with a MEMS chip. It was placed on a PCB board with heating resistors. The MEMS chip was kept at a constant temperature state by dynamically modulating the on-and-off time of the heating resistors with a PID algorithm in MCU. After the calibration the constant temperature will not vary with the variation of ambient temperature, which enables the sensor to function in a wide range of ambient temperature. The results suggest that the designed sensor is a good choice for measurement of atmosphere pressure.