Numerical analysis of anchor mode effect in elliptic mode MEMS ring resonator

The ring shaped resonator is a typical structure which is widely applied in MEMS resonator study. Elliptic mode is the basic in-plane vibration mode of ring resonator. This paper presents the numerical analysis of anchor effect in the elliptic mode ring resonator based on energy method. The results show that activating the anchor mode can help to reduce the anchor loss. However, the quality factor of resonator can not be thus increased as the researchers previously suggested. The energy method suggested in this study provides an instructive way of anchor geometry design for MEMS resonators.