A differential resonant pressure micro sensor with identical sensitivity of two resonant beams

Resonant pressure micro sensors with differential design can achieve high linearity and sensitivity, and reduce the temperature drift. However, the reported differential resonant pressure micro sensors suffer from sensitivity mismatch among two resonant beams, leading to compromised performance. This problem is resulted from the undesirable choice of relative position of two resonant beams based on numerical simulations, which does not agree with experimental results. To address this issue, this paper presents a differential resonant pressure micro sensor with the sensitivity of two resonant beams fine-tuned. Based on numerical simulations, the sensitivity of the two resonant beams is designed as 46 Hz/kPa while the experimental results are 45 Hz/kPa for the central beam and -44 Hz/kPa for the side beam.