Fabrication of flexible graphene strain sensor based on PET substrate

Yuan Mingquan; Yang He; Zhang Zhaoyun; Xiong Zhuang

doi:10.11884/HPLPB201830.170423

Volume 30 Issue 3

Mar. 2018

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Yuan Mingquan, Yang He, Zhang Zhaoyun, et al. Fabrication of flexible graphene strain sensor based on PET substrate[J]. High Power Laser and Particle Beams, 2018, 30: 034101. doi: 10.11884/HPLPB201830.170423

Citation:

Yuan Mingquan, Yang He, Zhang Zhaoyun, et al. Fabrication of flexible graphene strain sensor based on PET substrate[J]. High Power Laser and Particle Beams, 2018, 30: 034101. doi: 10.11884/HPLPB201830.170423

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Fabrication of flexible graphene strain sensor based on PET substrate

doi: 10.11884/HPLPB201830.170423

Institute of Electronic Engineering, CAEP, P.O.Box 919-512, Mianyang 621999, China

Received Date: 2017-10-31
Rev Recd Date: 2017-12-04
Publish Date: 2018-03-15

Abstract

Abstract

In view of the incompatibility of PET material with the standard microfabrication due to its low intolerance to high temperature, an effective fabrication process including lithography, metal deposition and reactive ion etching have been developed which paves the way for direct micro processing on PET. Based on such a method, thin film graphene layer was grown and transferred to 0.5 mm thick PET substrate and the graphene strain sensor was successfully fabricated. According to the measurement results, the piezoresistive gauge factor of the graphene can be estimated about 1.3, which is in good accordance with the value given in literature. Such fabrication method can also be applied in the domain where flexible micro devices are required.
- graphene,
- strain sensor,
- PET,
- micro-fabrication

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References(9)

References

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