Fabrication of high-efficiency convex blazed gratings by swing ion beam etching

Wang Qiong; Shen Chen; Tan Xin; Qi Xiangdong; Bayanheshig

doi:10.11884/HPLPB201931.180298

Volume 31 Issue 6

Jul. 2019

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Article Navigation > High Power Laser and Particle Beams > 2019 > 31(6): 061001

Wang Qiong, Shen Chen, Tan Xin, et al. Fabrication of high-efficiency convex blazed gratings by swing ion beam etching[J]. High Power Laser and Particle Beams, 2019, 31: 061001. doi: 10.11884/HPLPB201931.180298

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Wang Qiong, Shen Chen, Tan Xin, et al. Fabrication of high-efficiency convex blazed gratings by swing ion beam etching[J]. High Power Laser and Particle Beams, 2019, 31: 061001. doi: 10.11884/HPLPB201931.180298

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Fabrication of high-efficiency convex blazed gratings by swing ion beam etching

doi: 10.11884/HPLPB201931.180298

Wang Qiong^1
,,
Shen Chen^{2, 3},
Tan Xin^{2
,
,},
Qi Xiangdong²,
Bayanheshig²

1.
Institute of Fluid Physics, CAEP, Mianyang 621999, China
2.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
3.
University of Chinese Academy of Sciences, Beijing 100049, China

Received Date: 2018-10-30
Rev Recd Date: 2019-03-01
Publish Date: 2019-07-15

Abstract

Abstract

We use the swing ion-beam etching method to fabricate short wave infrared convex blazed gratings. This method solves the consistency problem of blaze angles by swing etching through the meridian direction of the gratings. A geometric model is built to analyze the influence of swinging speed and beam slit width on groove evolution. Convex gratings with a 45.5 gr/mm groove density, 67 mm aperture, 156.88 mm radius of curvature and 2.2° blaze angle have been fabricated and measured. Experimental results validate that high-efficiency convex gratings of small blaze angle and high groove consistency can be produced by swing etching to satisfy the requirements for high spectral resolution and miniaturization of imaging spectrometers.
- convex blazed gratings,
- swing etching,
- diffraction efficiency,
- imaging spectrometer

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References(24)

References

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