High-performance multifunctional apparatus for studying secondary electron emission characteristics of dielectric

He Yun; Yang Jing; Miao Guanghui; Zhang Na; Cui Wanzhao

doi:10.11884/HPLPB202032.190318

Volume 32 Issue 3

Feb. 2020

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He Yun, Yang Jing, Miao Guanghui, et al. High-performance multifunctional apparatus for studying secondary electron emission characteristics of dielectric[J]. High Power Laser and Particle Beams, 2020, 32: 033003. doi: 10.11884/HPLPB202032.190318

Citation:

He Yun, Yang Jing, Miao Guanghui, et al. High-performance multifunctional apparatus for studying secondary electron emission characteristics of dielectric[J]. High Power Laser and Particle Beams, 2020, 32: 033003. doi: 10.11884/HPLPB202032.190318

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High-performance multifunctional apparatus for studying secondary electron emission characteristics of dielectric

doi: 10.11884/HPLPB202032.190318

National Key Laboratory of Science and Technology on Space Microwave, China Academy of Space Technology (Xi’an), Xi’an 710000, China

Received Date: 2019-08-27
Rev Recd Date: 2019-12-03
Publish Date: 2020-02-10

Abstract

Abstract

The paper introduces a high-performance multifunctional apparatus for studying secondary electron emission characteristics of dielectric. The apparatus is equipped with a collector containing three grids and a 30 eV−30 keV electron gun, the secondary electron emission characteristics of dielectric can be measured under ultra-high vacuum, and in-situ XPS analysis spectrometer, heating and argon ion sputtering can also be performed. The paper also introduces the measurement of secondary electron yield by pulse method, gives the measured secondary electron current pulse of gold and Al₂O₃, presents the charging saturation time and influence of the thickness of dielectric on the charge amount obtained by judging the change of the current pulse waveform with time and the number of irradiations.
- secondary electron,
- secondary electron yield,
- pulse method,
- vacuum electronics and technology

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References(10)

References

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