Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects

Shi Feng; Shu Yong; Song Ci; Tian Ye; Tie Guipeng; Xue Shuai; Xiao Hang

doi:10.11884/HPLPB202032.190399

Volume 32 Issue 3

Feb. 2020

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Shi Feng, Shu Yong, Song Ci, et al. Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects[J]. High Power Laser and Particle Beams, 2020, 32: 032002. doi: 10.11884/HPLPB202032.190399

Citation:

Shi Feng, Shu Yong, Song Ci, et al. Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects[J]. High Power Laser and Particle Beams, 2020, 32: 032002. doi: 10.11884/HPLPB202032.190399

Citation:

Shi Feng, Shu Yong, Song Ci, et al. Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects[J]. High Power Laser and Particle Beams, 2020, 32: 032002. doi: 10.11884/HPLPB202032.190399

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Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects

doi: 10.11884/HPLPB202032.190399

Shi Feng^{1, 2, 3
,},
Shu Yong⁴,
Song Ci^{1, 2, 3},
Tian Ye^{1, 2, 3},
Tie Guipeng^{1, 2, 3},
Xue Shuai^{1, 2, 3},
Xiao Hang^{1, 2, 3}

1.
College of Intelligent Science, National University of Defense Technology, Changsha 410073, China
2.
Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073, China
3.
Hunan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China
4.
Aviation Maintenance NCO Academy, Air Force Engineering University, Xinyang 464000, China

Received Date: 2019-10-11
Rev Recd Date: 2019-12-12
Publish Date: 2020-02-10

Abstract

Abstract

Various manufacturing defects would be introduced in traditional processing of ultraviolet fused silica components, which need to be eliminated by post-processing technique. Because of the defects, the processing efficiency and surface quality cannot meet the requirements. To solve these problems, the research group proposed controllable compliant techniques including magnetorheological finishing, ion beam figuring, conformal smoothing and hydrodynamic polishing to improve processing effect of fused silica components, and carried out related research. This paper mainly introduces the important progress made by the research group on key technologies, including sub-nanometer precision surface controlled manufacturing technology, nano-precision intrinsic surface property controlled manufacturing method, high-precision and low-defect combination process, equipment of fused silica component. Discussing key technologies and their development status, it provides references for the development of high precision and few defects manufacturing technology of ultraviolet fused silica components in the future.
- fused silica components,
- high precision,
- few defects,
- nano-precision,
- surface controlled manufacturing,
- intrinsic surface

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References(22)

References

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