Influence of ammonia-hexamethyldisilazane on environmental stability of SiO<sub>2</sub> chemical film

Chen Xibing; Jiang Xiaodong; Cao Linhong; Fu Yajun; Yan Hongwei; Yan Lianghong

doi:10.11884/HPLPB202133.200317

Volume 33 Issue 4

May 2021

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Chen Xibing, Jiang Xiaodong, Cao Linhong, et al. Influence of ammonia-hexamethyldisilazane on environmental stability of SiO2 chemical film[J]. High Power Laser and Particle Beams, 2021, 33: 041001. doi: 10.11884/HPLPB202133.200317

Citation:

Chen Xibing, Jiang Xiaodong, Cao Linhong, et al. Influence of ammonia-hexamethyldisilazane on environmental stability of SiO₂ chemical film[J]. High Power Laser and Particle Beams, 2021, 33: 041001. doi: 10.11884/HPLPB202133.200317

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Influence of ammonia-hexamethyldisilazane on environmental stability of SiO₂ chemical film

doi: 10.11884/HPLPB202133.200317

1.
Southwest University of Science and Technology, Mianyang 621010, China
2.
Laser Fusion Research Center, CAEP, Mianyang 621900, China

Received Date: 2020-11-21
Rev Recd Date: 2021-03-18

Available Online: 2021-04-10

Publish Date: 2021-05-02

Abstract

Abstract

The single-layer SiO₂ chemical films prepared by sol-gel technology were modified with different amounts of ammonia-hexamethyldisilazane (HMDS) atmosphere at room temperature, and then the anti-pollution porformance of the chemical films for dibutyl phthalate (DBP) contamination were tested under low vacuum condition. In addition, the ultraviolet-visible-near-infrared spectrophotometer UV-Vis-NIR), infrared spectrometer and atomic force microscope were used to analyze the evolution of chemical film characteristics before and after modification. The results show that after DBP contamination, the peak transmittance of the chemical film modified by 15−30 mL ammonia-HMDS is 99.8%, which is increased by 3.5% compared with that of the chemical film before modification. At this time, the chemical films have excellent anti-pollution properties. Although the ammonia-HMDS treatment can significantly enhance the anti-pollution performance of DBP contamination of the chemical film, excessive amount of ammonia-HMDS will lead to the laser damage threshold of the chemical film to decrease from 24.3 J/cm² to 19.3 J/cm². The research is helpful to optimize the process parameters to improve the anti-pollution performance of the chemical film, which has great significance for practical engineering applications.
- sol-gel technique,
- SiO₂ chemical film,
- ammonia-HMDS,
- dibutyl phthalate,
- the laser damage threshold

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References(19)

References

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